| 
				 ┃ Chamber  | 
			
				 Brand:GWS ER-02;  | 
		
| 
				 
  | 
			
				 Dimension:500*750*600(mm);  | 
		
| 
				 ┃ Capacity  | 
			
				 2~4 zones,8 slots;  | 
		
| 
				 
  | 
			
				 40/80 DUTs per slot;Total 320/640;  | 
		
| 
				 ┃ Driver board  | 
			
				 8 pcs;  | 
		
| 
				 ┃ Equipment  | 
			
				 Dimension:1700W*1350D*2000H(mm);  | 
		
| 
				 
  | 
			
				 Power:8KW / Weight:500KG  | 
		
	
| 
					 See more parm. Pls refer to  |