┃ Chamber |
Brand:GWS ER-02; |
|
Dimension:500*750*600(mm); |
┃ Capacity |
2~4 zones,8 slots; |
|
40/80 DUTs per slot;Total 320/640; |
┃ Driver board |
8 pcs; |
┃ Equipment |
Dimension:1700W*1350D*2000H(mm); |
|
Power:8KW / Weight:500KG |
See more parm. Pls refer to |